In Situ Patterning of Ultrasharp Dopant Profiles in Silicon

Simon Phillip Cooil, Federico Mazzola, Hagen W. Klemm, Gina Peschel, Yuran R. Niu, Alexei A. Zakharov, Michelle Y. Simmons, Thomas Schmidt, David Evans, Jill A. Miwa, Justin W Wells

Allbwn ymchwil: Cyfraniad at gyfnodolynErthygladolygiad gan gymheiriaid

9 Dyfyniadau (Scopus)
104 Wedi eu Llwytho i Lawr (Pure)

Ôl bys

Gweld gwybodaeth am bynciau ymchwil 'In Situ Patterning of Ultrasharp Dopant Profiles in Silicon'. Gyda’i gilydd, maen nhw’n ffurfio ôl bys unigryw.

Chemistry

Material Science