Investigation of Nitrogen Incorporation into Manganese Based Copper Diffusion Barrier Layers for Future Interconnect Applications

V. Selvaraju, Anita Brady-Boyd, J. Bogan, Robert O'Connor, Greg Hughes

Allbwn ymchwil: Pennod mewn Llyfr/Adroddiad/Trafodion CynhadleddTrafodion Cynhadledd (Nid-Cyfnodolyn fathau)

Iaith wreiddiolSaesneg
Teitl2017 Materials for Advanced Metallization Conference MAM
StatwsCyhoeddwyd - 2017
DigwyddiadMaterials for Advanced Metallization Conference - Dresden, Yr Almaen
Hyd: 26 Maw 201729 Maw 2017

Cynhadledd

CynhadleddMaterials for Advanced Metallization Conference
Teitl crynoMAM2017
Gwlad/TiriogaethYr Almaen
DinasDresden
Cyfnod26 Maw 201729 Maw 2017

Dyfynnu hyn