Investigation of Nitrogen Incorporation into Manganese Based Copper Diffusion Barrier Layers for Future Interconnect Applications

V. Selvaraju, Anita Brady-Boyd, J. Bogan, Robert O'Connor, Greg Hughes

Adran Ffiseg

Dublin City University

Allbwn ymchwil: Pennod mewn Llyfr/Adroddiad/Trafodion Cynhadledd › Trafodion Cynhadledd (Nid-Cyfnodolyn fathau)

1 Erthygl

1 canlyniad

2018
Investigation of nitrogen incorporation into manganese based copper diffusion barrier layers for future interconnect applications
Selvaraju, V., Brady-Boyd, A., O'Connor, R., Hughes, G. & Bogan, J., Rhag 2018, Yn: Surfaces and Interfaces. 13, t. 133-138 6 t.
Allbwn ymchwil: Cyfraniad at gyfnodolyn › Erthygl › adolygiad gan gymheiriaid
7 Dyfyniadau (Scopus)