On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers

A. Brady-Boyd, R. O'Connor, S. Armini, V. Selvaraju, G. Hughes, J. Bogan^*

^*Awdur cyfatebol y gwaith hwn

Allbwn ymchwil: Cyfraniad at gyfnodolyn › Erthygl › adolygiad gan gymheiriaid

28 Dyfyniadau (Scopus)

28 Dyfyniadau
1 Trafodion Cynhadledd (Nid-Cyfnodolyn fathau)

1 canlyniad

Hidlydd

2017

On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers
Brady-Boyd, A., O'Connor, R., Armini, S., Selvaraju, V., Hughes, G. & Bogan, J., 2017, 2017 Materials for Advanced Metallization Conference MAM.
Allbwn ymchwil: Pennod mewn Llyfr/Adroddiad/Trafodion Cynhadledd › Trafodion Cynhadledd (Nid-Cyfnodolyn fathau)