@inproceedings{679ac3f5a23348feafd8a875e1a71a19,
title = "Characterisation of Electroless Deposited Cobalt by Hard and Soft X-ray Photoemission Spectroscopy",
abstract = "Electroless deposited (ELD) cobalt with palladium as a catalyst, and an underlying self-assembled monolayer (SAM) was investigated for potential use in advanced complementary metal oxide semiconductor (CMOS) applications using both hard (HAXPES) and soft (XPS) x-ray photoelectron spectroscopy. HAXPES spectra established the uniformity of the deposited Co film and the nature of the buried Co-Si interface 20nm below the surface. The Pd is seen to diffuse through the Co following thermal annealing. While the deposited Co film is predominantly metallic, Co-silicide forms at the Co-Si interface upon deposition and decomposes with thermal anneal up to 500°C.",
author = "A. Brady-Boyd and R. O'Connor and S. Armini and S. Selvaraju and G. Hughes and J. Bogan",
note = "Funding Information: The authors would like to gratefully acknowledge financial support from the SFI PI Programme under Grant No. 13/1A/1955. The authors also gratefully acknowledge Diamond Light Source for time on beamline i09 under proposal SI19698-1. The research leading to this result has been supported by the project CALIPSOplus under the Grant Agreement 730872 from the EU Framework Programme for Research and Innovation HORIZON 2020.This work was carried out within the IMEC Industrial Affiliation Programme on Advanced Interconnects (IIAP). Publisher Copyright: {\textcopyright} 2018 IEEE.; 18th International Conference on Nanotechnology, NANO 2018 ; Conference date: 23-07-2018 Through 26-07-2018",
year = "2019",
month = jan,
day = "27",
doi = "10.1109/NANO.2018.8626253",
language = "English",
series = "Proceedings of the IEEE Conference on Nanotechnology",
publisher = "IEEE Press",
booktitle = "18th International Conference on Nanotechnology, NANO 2018",
address = "United States of America",
}