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In Situ Patterning of Ultrasharp Dopant Profiles in Silicon
Simon Phillip Cooil, Federico Mazzola, Hagen W. Klemm, Gina Peschel, Yuran R. Niu, Alexei A. Zakharov, Michelle Y. Simmons, Thomas Schmidt, David Evans, Jill A. Miwa, Justin W Wells
Research output: Contribution to journal › Article › peer-review
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