In Situ Patterning of Ultrasharp Dopant Profiles in Silicon

  • Simon Phillip Cooil
  • , Federico Mazzola
  • , Hagen W. Klemm
  • , Gina Peschel
  • , Yuran R. Niu
  • , Alexei A. Zakharov
  • , Michelle Y. Simmons
  • , Thomas Schmidt
  • , David Evans
  • , Jill A. Miwa
  • , Justin W Wells

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)
115 Downloads (Pure)

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