In Situ Patterning of Ultrasharp Dopant Profiles in Silicon

Simon Phillip Cooil, Federico Mazzola, Hagen W. Klemm, Gina Peschel, Yuran R. Niu, Alexei A. Zakharov, Michelle Y. Simmons, Thomas Schmidt, David Evans, Jill A. Miwa, Justin W Wells

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)
86 Downloads (Pure)

Search results