Investigation of Nitrogen Incorporation into Manganese Based Copper Diffusion Barrier Layers for Future Interconnect Applications

V. Selvaraju, Anita Brady-Boyd, J. Bogan, Robert O'Connor, Greg Hughes

Research output: Chapter in Book/Report/Conference proceedingConference Proceeding (Non-Journal item)

Original languageEnglish
Title of host publication2017 Materials for Advanced Metallization Conference MAM
Publication statusPublished - 2017
EventMaterials for Advanced Metallization Conference - Dresden, Germany
Duration: 26 Mar 201729 Mar 2017

Conference

ConferenceMaterials for Advanced Metallization Conference
Abbreviated titleMAM2017
Country/TerritoryGermany
CityDresden
Period26 Mar 201729 Mar 2017

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