Investigation of Nitrogen Incorporation into Manganese Based Copper Diffusion Barrier Layers for Future Interconnect Applications

V. Selvaraju, Anita Brady-Boyd, J. Bogan, Robert O'Connor, Greg Hughes

Department of Physics

Dublin City University

Research output: Chapter in Book/Report/Conference proceeding › Conference Proceeding (Non-Journal item)

1 Article

1 results

2018
Investigation of nitrogen incorporation into manganese based copper diffusion barrier layers for future interconnect applications
Selvaraju, V., Brady-Boyd, A., O'Connor, R., Hughes, G. & Bogan, J., Dec 2018, In: Surfaces and Interfaces. 13, p. 133-138 6 p.
Research output: Contribution to journal › Article › peer-review
7 Citations (Scopus)