Research output per year
Research output per year
A. Brady-Boyd, R. O'Connor, S. Armini, V. Selvaraju, G. Hughes, J. Bogan*
Research output: Contribution to journal › Article › peer-review
In this work x-ray photoelectron spectroscopy is used to investigate in-vacuo, the interaction of metallic manganese with a (3-trimethoxysilylpropyl)diethylenetriamine (DETA) self-assembled monolayer (SAM) on SiO 2 and non-porous low-k dielectric materials. Subsequent deposition of a ∼0.5 nm thick Mn, followed by a 200 °C anneal results in the Mn diffusing through the SAM to interact with the underlying SiO 2 layer to form a Mn-silicate layer. Furthermore, there is evidence that the Mn interacts with the carbon and nitrogen within the SAM to form Mn-carbide and Mn-nitride, respectively. When deposited on low-k materials the Mn is found to diffuse through to the SAM on deposition and interact both with the SAM and the underlying substrate in a similar fashion.
Original language | English |
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Pages (from-to) | 260-266 |
Number of pages | 7 |
Journal | Applied Surface Science |
Volume | 427 |
DOIs | |
Publication status | Published - 01 Jan 2018 |
Externally published | Yes |
Research output: Chapter in Book/Report/Conference proceeding › Conference Proceeding (Non-Journal item)