On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers

Anita Brady-Boyd, Robert O'Connor, Silvia Armini, V. Selvaraju, Greg Hughes, J. Bogan

Research output: Chapter in Book/Report/Conference proceedingConference Proceeding (Non-Journal item)

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