On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers

A. Brady-Boyd, R. O'Connor, S. Armini, V. Selvaraju, G. Hughes, J. Bogan^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

29 Citations
1 Conference Proceeding (Non-Journal item)

1 results

Filter

2017

On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers
Brady-Boyd, A., O'Connor, R., Armini, S., Selvaraju, V., Hughes, G. & Bogan, J., 2017, 2017 Materials for Advanced Metallization Conference MAM.
Research output: Chapter in Book/Report/Conference proceeding › Conference Proceeding (Non-Journal item)