Quantitative evaluation of electron beam writing in passivated gold nanoclusters

R. E. Palmer; T. R. Bedson; Tudor Jenkins; D. J. Hayton

doi:10.1063/1.1354154

Quantitative evaluation of electron beam writing in passivated gold nanoclusters

R. E. Palmer, T. R. Bedson, Tudor Jenkins, D. J. Hayton

Department of Physics

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25 Citations (Scopus)

Abstract

We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists.

Original language	English
Pages (from-to)	1921-1923
Number of pages	3
Journal	Applied Physics Letters
Volume	78
Issue number	13
DOIs	https://doi.org/10.1063/1.1354154
Publication status	Published - 26 Mar 2001

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abstract = "We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists.",

author = "Palmer, {R. E.} and Bedson, {T. R.} and Tudor Jenkins and Hayton, {D. J.}",

note = "Jenkins, Tudor; Hayton, D.J.; Bedson, T.R.; Palmer, R.E., (2001) 'Quantitative evaluation of electron beam writing in passivated gold nanoclusters', Applied Physics Letters (78) pp.1921-1923 RAE2008",

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AU - Hayton, D. J.

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N2 - We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists.

AB - We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists.

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Quantitative evaluation of electron beam writing in passivated gold nanoclusters

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