Silicon technology in ion detection-a high resolution detector array

K. Birkinshaw; D. P. Langstaff

doi:10.1016/0168-1176(93)03940-N

Silicon technology in ion detection-a high resolution detector array

K. Birkinshaw^*, D. P. Langstaff

^*Corresponding author for this work

Department of Physics

Prifysgol Aberystwyth | Aberystwyth University

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

A new ion detecto array integrated on a silicon chip with a high spatial resolution has been designed at Aberystwyth. Integrated circuits are mounted on a ceramic substrate beneath a microchannel plate electron multiplier giving a small, light, low power, very low noise module. An array containing 384 detectors with a spatial resolution of 25 microns has been fully tested and test results are presented.

Original language	English
Pages (from-to)	193-206
Number of pages	14
Journal	International Journal of Mass Spectrometry and Ion Processes
Volume	132
Issue number	3
DOIs	https://doi.org/10.1016/0168-1176(93)03940-N
Publication status	Published - 07 Apr 1994

Keywords

Array
Detector
Ion
Mass spectrometer
Silicon

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10.1016/0168-1176(93)03940-N

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AB - A new ion detecto array integrated on a silicon chip with a high spatial resolution has been designed at Aberystwyth. Integrated circuits are mounted on a ceramic substrate beneath a microchannel plate electron multiplier giving a small, light, low power, very low noise module. An array containing 384 detectors with a spatial resolution of 25 microns has been fully tested and test results are presented.

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KW - Detector

KW - Ion

KW - Mass spectrometer

KW - Silicon

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Silicon technology in ion detection-a high resolution detector array

Abstract

Keywords

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