Silicon technology in ion detection-a high resolution detector array

K. Birkinshaw*, D. P. Langstaff

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)


A new ion detecto array integrated on a silicon chip with a high spatial resolution has been designed at Aberystwyth. Integrated circuits are mounted on a ceramic substrate beneath a microchannel plate electron multiplier giving a small, light, low power, very low noise module. An array containing 384 detectors with a spatial resolution of 25 microns has been fully tested and test results are presented.

Original languageEnglish
Pages (from-to)193-206
Number of pages14
JournalInternational Journal of Mass Spectrometry and Ion Processes
Issue number3
Publication statusPublished - 07 Apr 1994


  • Array
  • Detector
  • Ion
  • Mass spectrometer
  • Silicon


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