Abstract
A new ion detecto array integrated on a silicon chip with a high spatial resolution has been designed at Aberystwyth. Integrated circuits are mounted on a ceramic substrate beneath a microchannel plate electron multiplier giving a small, light, low power, very low noise module. An array containing 384 detectors with a spatial resolution of 25 microns has been fully tested and test results are presented.
| Original language | English |
|---|---|
| Pages (from-to) | 193-206 |
| Number of pages | 14 |
| Journal | International Journal of Mass Spectrometry and Ion Processes |
| Volume | 132 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 07 Apr 1994 |
Keywords
- Array
- Detector
- Ion
- Mass spectrometer
- Silicon