The Role of Atomic Oxygen in the Decomposition of Self-Assembled Monolayers During Dielectric Deposition

Anita Brady-Boyd, Robert O'Connor, Silvia Armini, V. Selvaraju, J. Bogan

Research output: Chapter in Book/Report/Conference proceeding › Conference Proceeding (Non-Journal item)

Original language	English
Title of host publication	ISSC-22 Interdisciplinary Surface Science Conference
Subtitle of host publication	15–18 April 2019 Village Hotel, Swansea, UK
Pages	56-57
Number of pages	2
Publication status	Published - 2019
Event	ISSC-22 Interdisciplinary Surface Science Conference - Village Hotel, Swansea, United Kingdom of Great Britain and Northern Ireland Duration: 15 Apr 2019 → 18 Apr 2019

Conference	ISSC-22 Interdisciplinary Surface Science Conference
Country/Territory	United Kingdom of Great Britain and Northern Ireland
City	Swansea
Period	15 Apr 2019 → 18 Apr 2019

Permanent link

@inproceedings{2e633e813ebd4f76a97d116618331903,

title = "The Role of Atomic Oxygen in the Decomposition of Self-Assembled Monolayers During Dielectric Deposition",

author = "Anita Brady-Boyd and Robert O'Connor and Silvia Armini and V. Selvaraju and J. Bogan",

year = "2019",

language = "English",

pages = "56--57",

booktitle = "ISSC-22 Interdisciplinary Surface Science Conference",

note = "ISSC-22 Interdisciplinary Surface Science Conference ; Conference date: 15-04-2019 Through 18-04-2019",

}

Brady-Boyd, A, O'Connor, R, Armini, S, Selvaraju, V & Bogan, J 2019, The Role of Atomic Oxygen in the Decomposition of Self-Assembled Monolayers During Dielectric Deposition. in ISSC-22 Interdisciplinary Surface Science Conference: 15–18 April 2019 Village Hotel, Swansea, UK. pp. 56-57, ISSC-22 Interdisciplinary Surface Science Conference, Swansea, United Kingdom of Great Britain and Northern Ireland, 15 Apr 2019.

The Role of Atomic Oxygen in the Decomposition of Self-Assembled Monolayers During Dielectric Deposition. / Brady-Boyd, Anita; O'Connor, Robert; Armini, Silvia et al.
ISSC-22 Interdisciplinary Surface Science Conference: 15–18 April 2019 Village Hotel, Swansea, UK. 2019. p. 56-57.

Research output: Chapter in Book/Report/Conference proceeding › Conference Proceeding (Non-Journal item)

TY - GEN

T1 - The Role of Atomic Oxygen in the Decomposition of Self-Assembled Monolayers During Dielectric Deposition

AU - Brady-Boyd, Anita

AU - O'Connor, Robert

AU - Armini, Silvia

AU - Selvaraju, V.

AU - Bogan, J.

PY - 2019

Y1 - 2019

M3 - Conference Proceeding (Non-Journal item)

SP - 56

EP - 57

BT - ISSC-22 Interdisciplinary Surface Science Conference

T2 - ISSC-22 Interdisciplinary Surface Science Conference

Y2 - 15 April 2019 through 18 April 2019

ER -