Ultrabroadband transmission measurements on waveguides of silicon-rich silicon dioxide

R. T. Neal, M. D.C. Charlton, G. J. Parker, C. E. Finlayson*, M. C. Netti, Jeremy J. Baumberg

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

21 Citations (SciVal)

Abstract

Waveguides of luminescent (annealed) and nonluminescent (unannealed) SRSO were fabricated using PECVD. Unannealed waveguides exhibited good transmission qualities throughout the visible spectrum, while annealed waveguides were absorbing below 700 nm. The onset wavelength for this absorption was invariant with changes to the anneal time and silicon incorporation in the waveguide core layer.

Original languageEnglish
Pages (from-to)4598-4600
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number22
DOIs
Publication statusPublished - 01 Dec 2003
Externally publishedYes

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