Waveguides of luminescent (annealed) and nonluminescent (unannealed) SRSO were fabricated using PECVD. Unannealed waveguides exhibited good transmission qualities throughout the visible spectrum, while annealed waveguides were absorbing below 700 nm. The onset wavelength for this absorption was invariant with changes to the anneal time and silicon incorporation in the waveguide core layer.
|Number of pages||3|
|Journal||Applied Physics Letters|
|Publication status||Published - 01 Dec 2003|